The Micromachine Summit was first organized in 1995 by the Micromachine Center (Japan), and "The 1st Micromachine Summit 1995" was held on March 13-15, 1995 in Kyoto, Japan, with near 30 representatives from 10 countries. To date, the Micromachine Summit has near 80 representatives from more than 25 countries/regions.

The Micromachine Summit provides a Micro-Nano Technology and Smart Systems snapshot to worldwide industrial, academic and government initiatives. Delegations from the most important regions and countries in the Microtechnology arena participate in this Summit. Delegates gather in a roundtable environment to address the topics of special interests and discuss the progress and policies in each country and region.

The Summit is thus based on a set of country/region reviews given by the Chief Delegate followed by technical presentations mainly on topics of specific selected for each yearly event.